@inproceedings{e33b92fc1140430a8cc1d21b344b6512,
title = "Oxidation study of ge condensation on sgoi nanowire biosensor fabrication",
abstract = "The Ge condensation method is effective in increasing the Ge fraction of Ge in SGOI. Previous studies by the authors confirmed a correlation between the Ge fraction and the sensitivity of the SiGe nano-wire sensor. To understand how Ge condensation on an SGOI nano-wire sensor helps to optimize oxidation conditions and sensitivity, the effect of oxidizing gas and the SiGe/aα-Si stacked structure on the movement of Ge is investigated. The analytical results reveal that the sensitivity of SiGe nano-wires can be optimized by stacking an Si1-xGex layer that contains 14% Ge on a 200 A-thick aα-Si layer and treating the stack with O2 gas diluted by 13% N2 for 3 min.",
author = "Kow-Ming Chang and Chen, {Chu Feng} and Lai, {Chiung Hui} and Wu, {Chin Ning} and Hsieh, {Cheng Ting} and Wang, {Yu Bin} and Liu, {Chung Hsien} and Chang, {Kuo Chin}",
year = "2013",
month = oct,
day = "22",
doi = "10.1149/04514.0055ecst",
language = "English",
isbn = "9781607683711",
series = "ECS Transactions",
number = "14",
pages = "55--66",
booktitle = "Sensors, Actuators, and Microsystems (General) - 221st ECS Meeting",
edition = "14",
note = "null ; Conference date: 06-05-2012 Through 10-05-2012",
}