Organic thin-film transistors with AIN film as a gate-insulator by RFIICF sputtering

Kuo Hsi Yen*, Hsiao-Wen Zan, Chueh Ping Ko, Pu Kuan Liu, Tzu Yueh Chang, Kuo Hai Su, Chiung Sheng Wei, Po-Tsung Lee, Chien Hsun Chen, Chun Ming Yeh, Jennchang Hwang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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Engineering & Materials Science