Optical micromachining or microelectromechanical systems (MEMS) typically require etch holes to reduce the time required to release the micromechanical structure during the sacrificial undercutting. However, high-order diffraction beams generated by the periodic etch-hole array often deteriorate the optical performance by generating noise and erroneous crosstalk signals in most optical systems. In this study, we examined the diffraction from a perforated micromirror and proposed a random distributed etch-hole layout. Due to the superposition of cosine functions with random periods, noise caused by high-order beams can be averaged effectively.
|Number of pages||3|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Issue number||2 A|
|State||Published - 8 Feb 2006|
- Etch holes