Optical metrology of randomly-distributed Au colloids on a multilayer film

Shih Hsin Hsu, Yia Chung Chang*, Yi-Chun Chen, Pei Kuen Wei, Y. D. Kim

*Corresponding author for this work

Research output: Contribution to journalArticle

12 Scopus citations


Spectroscopic ellipsometry (SE) measurements coupled with efficient theoretical modeling and scanning electron microscopy analysis are used in the metrology of randomly-distributed gold nanoparticles on a multilayer film. Measurements were conducted in the ultraviolet to near infrared region at several angles of incidence. To understand the size, shape, and distribution of nanoparticles, a finite-element Green's function approach considering the scattering from multiple nanoparticles was employed to calculate the ellipsometry parameters. Our calculations are in fair agreement with the ellipsometry measurements when suitable size, shape, and distribution pattern of nanoparticles are found. This demonstrates that SE could be a useful tool to the metrology of arbitrarily-distributed nanoparticles on a multilayer film.

Original languageEnglish
Pages (from-to)1310-1315
Number of pages6
JournalOptics Express
Issue number2
StatePublished - 18 Jan 2010

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