One-Step Cleaning Solution to Replace the Conventional RCA Two-Step Cleaning Recipe for Pregate Oxide Cleaning

Tung Ming Pan*, Tan Fu Lei, Tien-Sheng Chao, Ming Chi Liaw, Fu-Hsiang Ko, Chih Peng Lu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

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Chemical Compounds

Engineering & Materials Science