Abstract
Employing a novel test structure, electron velocity overshoot in silicon inversion layers is observed at room temperature. For channel lengths longer than 03μm, the velocity/field relation follows the well-known behavior with no channel length dependence. The first indication of velocity overshoot is seen at channel length of 0.22 μm, while at L = 0.12 μm drift velocities up to 35% larger than the long channel value are measured.
Original language | English |
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Pages (from-to) | 484-486 |
Number of pages | 3 |
Journal | IEEE Electron Device Letters |
Volume | 14 |
Issue number | 10 |
DOIs | |
State | Published - 1 Jan 1993 |