Observation of dislocation etch pits in epitaxial lateral overgrowth GaN by wet chemical etching

T. C. Wen*, S. C. Lee, H. S. Chuang, C. H. Chiou, Wei-I Lee

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

This work investigates dislocation etch pits in epitaxial lateral overgrowth (ELO) GaN by wet chemical etching. A mixture of H 2 SO 4 and H 3 PO 4 was used as a dislocation etchant, and SEM and AFM were employed to observe the surface topography. For the as-grown sample, SEM images present the flat, smooth surface without any pits or hillocks. After the chemical etching, hexagonal shaped etch pits were observed at the edge of ELO GaN. AFM observation of etched ELO GaN displayed high densities of etch pits clustered in the "window" region and the coalescent line of two growing fronts. In contrast, the overgrowth region was nearly free of etch pits. Moreover, we observed that different sizes of etch pits dominated in "window" region and coalescent region. This implied different types dislocations dominated in these regions.

Original languageEnglish
JournalMaterials Research Society Symposium - Proceedings
Volume639
StatePublished - 1 Dec 2001
EventGaN and Related Alloys 2000 - Boston, MA, United States
Duration: 27 Nov 20001 Dec 2000

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