Novel three-dimensional beam tracking system for stationary-sample-type atomic force microscopy

Shao-Kang Hung; Li Chen Fu

doi:10.1109/TIM.2006.881571

Novel three-dimensional beam tracking system for stationary-sample-type atomic force microscopy

Shao-Kang Hung^*, Li Chen Fu

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

The stationary-sample (scanning-probe)-type atomic force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major challenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize "false deflection" is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy.

Original language	English
Pages (from-to)	1648-1654
Number of pages	7
Journal	IEEE Transactions on Instrumentation and Measurement
Volume	55
Issue number	5
DOIs	https://doi.org/10.1109/TIM.2006.881571
State	Published - 1 Oct 2006

Keywords

Atomic force microscope (AFM)
Nanotopography
Optical position measurement
Optomechatronics
Scanning probe microscope (SPM)

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