Novel three-dimensional beam tracking system for stationary-sample-type atomic force microscopy

Shao-Kang Hung*, Li Chen Fu

*Corresponding author for this work

Research output: Contribution to journalArticle

7 Scopus citations

Abstract

The stationary-sample (scanning-probe)-type atomic force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major challenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize "false deflection" is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy.

Original languageEnglish
Pages (from-to)1648-1654
Number of pages7
JournalIEEE Transactions on Instrumentation and Measurement
Volume55
Issue number5
DOIs
StatePublished - 1 Oct 2006

Keywords

  • Atomic force microscope (AFM)
  • Nanotopography
  • Optical position measurement
  • Optomechatronics
  • Scanning probe microscope (SPM)

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