The stationary-sample (scanning-probe)-type atomic force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major challenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize "false deflection" is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy.
|Number of pages||7|
|Journal||IEEE Transactions on Instrumentation and Measurement|
|State||Published - 1 Oct 2006|
- Atomic force microscope (AFM)
- Optical position measurement
- Scanning probe microscope (SPM)