Novel three-dimensional beam tracking system for stationary-sample type atomic force microscopy

Shao-Kang Hung*, Ing Shouh Hwang, Li Chen Fu

*Corresponding author for this work

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

The stationary-sample type atomic force microscope (AFM) has been demonstrated to have many advantages over conventional scanning-sample type AFM. However, a higher degree of instrumentation complexity has to be adopted to measure the deflection of a 3-dimensional moving probe in the stationary-sample type AFM. This paper proposes a novel stationary-sample type AFM with a laser beam tracking system. We devise an innovative method to minimize "false deflection". Our system has been verified to achieve high scanning speed without sacrificing high accuracy.

Original languageEnglish
Pages (from-to)1985-1989
Number of pages5
JournalConference Record - IEEE Instrumentation and Measurement Technology Conference
Volume3
DOIs
StatePublished - 8 Oct 2004
EventProceedings of the 21st IEEE Instrumentation and Measurement Technology Conference, IMTC/04 - Como, Italy
Duration: 18 May 200420 May 2004

Keywords

  • Atomic force microscope (AFM)
  • Optical instrumentation

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