The stationary-sample type atomic force microscope (AFM) has been demonstrated to have many advantages over conventional scanning-sample type AFM. However, a higher degree of instrumentation complexity has to be adopted to measure the deflection of a 3-dimensional moving probe in the stationary-sample type AFM. This paper proposes a novel stationary-sample type AFM with a laser beam tracking system. We devise an innovative method to minimize "false deflection". Our system has been verified to achieve high scanning speed without sacrificing high accuracy.
|Number of pages||5|
|Journal||Conference Record - IEEE Instrumentation and Measurement Technology Conference|
|State||Published - 8 Oct 2004|
|Event||Proceedings of the 21st IEEE Instrumentation and Measurement Technology Conference, IMTC/04 - Como, Italy|
Duration: 18 May 2004 → 20 May 2004
- Atomic force microscope (AFM)
- Optical instrumentation