Novel electrothermal bimorph actuator for large out-of-plane displacement and force

J. Wei*, T. Chu Duc, Gih Keong Lau, P. M. Sarro

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

This paper presents a novel concept and experimental validation of an electrothermal bimorph structure for out-of-plane actuation that exploits the polymer constraint effect. The proposed concept is capable of generating large out-of-plane displacements and forces at a low driving voltage and a low actuation temperature. A downward displacement up to 31 ?m is measured at only 5 V driving voltage and 46 mW power consumption. The actuator stiffness is measured to be 75 N/m, thus the corresponding calculated out-of-plane force is 2.3 mN. The maximum actuation temperature during the measurement is 100°C (80°C change). A 25 Hz response frequency is measured by monitoring the resistance change due to the temperature variation.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages46-49
Number of pages4
DOIs
StatePublished - 29 Aug 2008
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 13 Jan 200817 Jan 2008

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period13/01/0817/01/08

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