Nonconfocal differential interferometry sensing scheme for scanning probe microscopy

Yu Cheng Lin, Stone Cheng*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, we describe a nonconfocal differential interferometer to detect the cantilever vibration for a scanning probe microscope. Capable of focusing the beams on the different height surfaces of a cantilever to adapt the length of commercially available cantilever chips, the proposed two-beam interferometer can maintain the sensitivity by placing a glass slip for an object beam to extend the focal length to the cantilever. An experiment involving a scanning force microscope is performed in static mode operation for applications where topography and magnetic images are presented.

Original languageEnglish
Article number048002
JournalJapanese journal of applied physics
Volume50
Issue number4 PART 1
DOIs
StatePublished - 1 Apr 2011

Fingerprint Dive into the research topics of 'Nonconfocal differential interferometry sensing scheme for scanning probe microscopy'. Together they form a unique fingerprint.

Cite this