NiFe-AAO nanocomposite for performance enhancement of on-chip spiral inductors

Tzu Yuan Chao*, H. F. Hsu, K. M. Chen, Yu-Ting Cheng

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The paper presents a CMOS-compatible process to implement NiFe-anodic alumina oxide (AAO) nanocomposite material as a magnetic core for on-chip spiral inductor fabrication. The NiFe nanorod array with ∼70 nm in diameter and an aspect ratio of ∼14 is electroplated using Ti as a conductive layer in an anodic alumina oxide (AAO) template on a silicon substrate. Experimental results show that the spiral inductor using a NiFe-AAO nanocomposite magnetic core can have more than 25% inductance enhancement without any Q degradation to GHz range.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages2686-2689
Number of pages4
DOIs
StatePublished - 1 Sep 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period5/06/119/06/11

Keywords

  • Ferromagnetic Nanorods
  • NiFe-AAO Nanocomposite
  • On-Chip Spiral Inductors

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