Using the unique features of bent fiber probe operated in an atomic force microscope (AFM), nanostructure patterns were produced on polycarbonate. Several lines with widths varying from 260 to 600 nm and depths ranging from 30 to 120 nm were made.
|Number of pages||2|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - 1 Nov 2001|