Nanostructure patterns written in polycarbonate by a bent optical fiber probe

Sy Hann Chen; Yung-Fu Chen

doi:10.1116/1.1421555

Nanostructure patterns written in polycarbonate by a bent optical fiber probe

Sy Hann Chen^*, Yung-Fu Chen

^*Corresponding author for this work

National Chiao Tung University

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Using the unique features of bent fiber probe operated in an atomic force microscope (AFM), nanostructure patterns were produced on polycarbonate. Several lines with widths varying from 260 to 600 nm and depths ranging from 30 to 120 nm were made.

Original language	English
Pages (from-to)	2299-2300
Number of pages	2
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	19
Issue number	6
DOIs	https://doi.org/10.1116/1.1421555
State	Published - 1 Nov 2001

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title = "Nanostructure patterns written in polycarbonate by a bent optical fiber probe",

abstract = "Using the unique features of bent fiber probe operated in an atomic force microscope (AFM), nanostructure patterns were produced on polycarbonate. Several lines with widths varying from 260 to 600 nm and depths ranging from 30 to 120 nm were made.",

author = "Chen, {Sy Hann} and Yung-Fu Chen",

year = "2001",

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AU - Chen, Yung-Fu

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