Nanostructure patterns written in polycarbonate by a bent optical fiber probe

Sy Hann Chen; Yung-Fu Chen

doi:10.1116/1.1421555

Nanostructure patterns written in polycarbonate by a bent optical fiber probe

Sy Hann Chen^*, Yung-Fu Chen

^*Corresponding author for this work

Department of Electrophysics

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Using the unique features of bent fiber probe operated in an atomic force microscope (AFM), nanostructure patterns were produced on polycarbonate. Several lines with widths varying from 260 to 600 nm and depths ranging from 30 to 120 nm were made.

Original language	American English
Pages (from-to)	2299-2300
Number of pages	2
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	19
Issue number	6
DOIs	https://doi.org/10.1116/1.1421555
State	Published - 1 Nov 2001

Access to Document

10.1116/1.1421555

Fingerprint Dive into the research topics of 'Nanostructure patterns written in polycarbonate by a bent optical fiber probe'. Together they form a unique fingerprint.

Cite this

@article{739093ffdbac4cb1b2fcc01364f2c15e,

title = "Nanostructure patterns written in polycarbonate by a bent optical fiber probe",

abstract = "Using the unique features of bent fiber probe operated in an atomic force microscope (AFM), nanostructure patterns were produced on polycarbonate. Several lines with widths varying from 260 to 600 nm and depths ranging from 30 to 120 nm were made.",

author = "Chen, {Sy Hann} and Yung-Fu Chen",

year = "2001",

month = nov,

day = "1",

doi = "10.1116/1.1421555",

language = "American English",

volume = "19",

pages = "2299--2300",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Nanostructure patterns written in polycarbonate by a bent optical fiber probe

AU - Chen, Sy Hann

AU - Chen, Yung-Fu

PY - 2001/11/1

Y1 - 2001/11/1

N2 - Using the unique features of bent fiber probe operated in an atomic force microscope (AFM), nanostructure patterns were produced on polycarbonate. Several lines with widths varying from 260 to 600 nm and depths ranging from 30 to 120 nm were made.

AB - Using the unique features of bent fiber probe operated in an atomic force microscope (AFM), nanostructure patterns were produced on polycarbonate. Several lines with widths varying from 260 to 600 nm and depths ranging from 30 to 120 nm were made.

UR - http://www.scopus.com/inward/record.url?scp=0035519468&partnerID=8YFLogxK

U2 - 10.1116/1.1421555

DO - 10.1116/1.1421555

M3 - Article

AN - SCOPUS:0035519468

VL - 19

SP - 2299

EP - 2300

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

SN - 1071-1023

IS - 6

ER -

Nanostructure patterns written in polycarbonate by a bent optical fiber probe

Abstract

Access to Document

Other files and links

Cite this