Nanostructure patterns written in polycarbonate by a bent optical fiber probe

Sy Hann Chen*, Yung-Fu Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Using the unique features of bent fiber probe operated in an atomic force microscope (AFM), nanostructure patterns were produced on polycarbonate. Several lines with widths varying from 260 to 600 nm and depths ranging from 30 to 120 nm were made.

Original languageAmerican English
Pages (from-to)2299-2300
Number of pages2
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number6
DOIs
StatePublished - 1 Nov 2001

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