Nanometer-scale patterning of YBCO thin films

J. M. Macaulay*, Z. Bao, B. Bi, M. Gurvitch, S. Han, Jiunn-Yuan Lin, J. Lukens, B. Nadgorny

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Micro-scale bridges are fabricated in superconducting thin films of YBCO. The bridges are modified using a highly focussed, nanometer diameter, ≤30keV energy electron probe. Data are presented on the modified bridges which indicate that this approach may be useful for fabricating weak links and Josephson junctions. Consideration is given to mechanisms which may be responsible for modification of the YBCO thin film.

Original languageEnglish
Pages (from-to)211-213
Number of pages3
JournalSuperlattices and Microstructures
Volume11
Issue number2
DOIs
StatePublished - 1 Jan 1992

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