Nanoindentation study of FePt thin films deposited by radio frequency magnetron sputtering

Y. J. Chiu, C. Y. Shen, S. R. Jian*, H. W. Chang, Jenh-Yih Juang, Y. Y. Liao, C. L. Fan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


The microstructural and nanomechanical properties of Fe05Pt05 (FePt) thin films deposited on the glass substrates by radio frequency magnetron sputtering were investigated. Specifically, this study focused mainly on the effects of post-annealing on the evolvement of film microstructure and its correlation with the associated nano-mechanical properties. The X-ray diffraction (XRD) results indicated the FePt films were largely equiaxed with the average grain size being increased from ?27 nm to ?105 nm as the annealing temperature was raised from 400 C to 700 C. The associated film hardness and Young's modulus, as derived from the nano-indentation measurements, were decreased from 144±68 GPa and 1942±91 GPa to 81±02 GPa and 1538±65 GPa, respectively. The nano-mechanical properties of the present FePt films were well described by the Hall-Petch relation.

Original languageEnglish
Pages (from-to)260-265
Number of pages6
JournalNanoscience and Nanotechnology Letters
Issue number3
StatePublished - 1 Mar 2016


  • FePt
  • Hardness
  • Nanoindentation
  • Thin Films

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