Nanoindentation of Bi2Se3 thin films

Hong Da Lai, Sheng Rui Jian*, Le Thi Cam Tuyen, Phuoc Huu Le, Chih-Wei Luo, Jenh-Yih Juang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

The nanomechanical properties and nanoindentation responses of bismuth selenide (Bi2Se3) thin films are investigated in this study. The Bi2Se3 thin films are deposited on c-plane sapphire substrates using pulsed laser deposition. The microstructural properties of Bi2Se3 thin films are analyzed by means of X-ray diffraction (XRD). The XRD results indicated that Bi2Se3 thin films are exhibited the hexagonal crystal structure with a c-axis preferred growth orientation. Nanoindentation results showed the multiple "pop-ins" displayed in the loading segments of the load-displacement curves, suggesting that the deformation mechanisms in the hexagonal-structured Bi2Se3 films might have been governed by the nucleation and propagation of dislocations. Further, an energetic estimation of nanoindentation-induced dislocation associated with the observed pop-in effects was made using the classical dislocation theory.

Original languageEnglish
Article number518
JournalMicromachines
Volume9
Issue number10
DOIs
StatePublished - 14 Oct 2018

Keywords

  • BiSe thin films
  • Hardness
  • Nanoindentation
  • Pop-in

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