Nanofabrication Of Titanium Surface By Tip-Induced Anodization In Scanning Tunneling Microscopy

Hiroyuki Sugimura, Tatsuya Uchida, Noboru Kltamura, Hiroshi Masuhara

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Abstract

A titanium (Ti) surface was arbitrarily oxidized by a scanning tunneling microscope (STM). Oxidation of the Ti surface was induced by scanning an STM tip with the sample (Ti) bias of more than +3 V, and a dot or line pattern of oxide was fabricated on Ti with the spatial resolution of 70 nm. The results were discussed in terms of tip-induced anodization of Ti due to water adsorbed on the surface.

Original languageEnglish
Pages (from-to)L553-L555
JournalJapanese Journal of Applied Physics
Volume32
Issue number4 A
DOIs
StatePublished - 1 Jan 1993

Keywords

  • Anodization
  • Scanning tunneling microscopy
  • Surface modification
  • Titanium
  • Titanium oxide

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