Nanofabrication of photonic crystal membrane lasers

J. R. Cao*, Po-Tsung Lee, Sang Jun Choi, Roshanak Shafiiha, Seung June Choi, John D. O'Brien, P. Daniel Dapkus

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

The nanofabrication of photonic crystal (PC) membrane defect lasers was done. With a sequential process of ion beam etching, reactive ion etching, and electron cyclotron resonance etching, the thin membrane PC defects structures were formed by transferring an electron-beam lithographically defined lattice pattern into an epitaxial layer structure. Wet chemical etching using a 4:1 mixture of HCl and H 2 O was used for the formation of a V-shaped undercut channel to create the suspended membrane.

Original languageEnglish
Pages (from-to)618-621
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number2
DOIs
StatePublished - 1 Mar 2002

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