Multiphoton-ionization / mass spectrometric detection of gallium atom during the trimethylgallium CVD reaction

D. W. Squire, C. S. Dulcey*, Ming-Chang Lin

*Corresponding author for this work

Research output: Contribution to journalArticle

19 Scopus citations

Abstract

Gallium atoms were detected by multiphoton-ionization mass spectrometry in the low-pressure decomposition of trimethylgallium (TMG) on heated substrates (300-1100K). On copper surfaces, an activation energy of 34±3 kcal mol-1 was found for the production of Ga (ground state). This activation energy is attributed to the desorption of gallium from the surface. GaAs substrates produce similar results at lower temperatures (T≤ 870 K).

Original languageEnglish
Pages (from-to)112-117
Number of pages6
JournalChemical Physics Letters
Volume131
Issue number1-2
DOIs
StatePublished - 31 Oct 1986

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