Recently, modeling and simulation of hybrid dynamic systems (HDSs) have attracted much attention. However, since simultaneously dealing with the discrete and continuous variables is very difficult, most of the models result in a unified but more complicated and unnatural format. Moreover, design engineers cannot be allowed to use their preferred domain models. Based on the multiparadigm modeling concept, this correspondence proposes a Petri net framework with associated state equations to model the HDSs. In the presented approach, modeling schemes of the hybrid systems are separated but combined in a hierarchical way through specified interfaces. Designers can still work in their familiar domain-specific modeling paradigms, and the heterogeneity is hidden when composing large systems. An application to a rapid thermal process in semiconductor manufacturing is provided to demonstrate the practicability of the developed approach.
|Number of pages||6|
|Journal||IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans|
|State||Published - Mar 2008|
- automated manufacturing systems; hybrid dynamic systems (HDSs); multiparadigm modeling (MPaM); Petri nets (PNs); semiconductor manufacturing
Lee, J-S., Zhou, M., & Hsu, P-L. (2008). Multiparadigm modeling for hybrid dynamic systems using a Petri net framework. IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans, 38(2), 493-498. https://doi.org/10.1109/TSMCA.2007.914747