Multi-sensory combined integrated low power tunable-gain interface circuit

Chun Te Tung, Kuei-Ann Wen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents MEMS multi-sensors with low power tunable-gain interface circuit that can be monolithically integrated in the ASIC compatible standard CMOS process. A high gain ultra-low power sustaining TIA amplifier circuit with PLL compactly has been integrated with the resonator-based core sensing structure. The proposed low-power readout circuit adopts Correlated Double Sampling (CDS) to suppress low frequency noise and compensate DC offset. The gyroscope sensitivity is designed to be 1.8 aF/°/sec within ±100 °/sec. The tunable sensitivity can be adjusted from 28 mV/fF to 224 mV/fF by fully-differential programmable-gain amplifier (PGA). The interface circuit has 61.12dB SNR under 500 KHz sampling rate.

Original languageEnglish
Title of host publicationChina Semiconductor Technology International Conference 2017, CSTIC 2017
EditorsSteve Liang, Ying Shi, Ru Huang, Qinghuang Lin, David Huang, Hanming Wu, Yuchun Wang, Cor Claeys, Kafai Lai, Ying Zhang, Peilin Song, Viyu Shi, Zhen Guo
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509066940
DOIs
StatePublished - 4 May 2017
Event2017 China Semiconductor Technology International Conference, CSTIC 2017 - Shanghai, China
Duration: 12 Mar 201713 Mar 2017

Publication series

NameChina Semiconductor Technology International Conference 2017, CSTIC 2017

Conference

Conference2017 China Semiconductor Technology International Conference, CSTIC 2017
CountryChina
CityShanghai
Period12/03/1713/03/17

Keywords

  • CMOS MEMS sensor
  • Correlated Double Sampling
  • Gyroscope
  • Interface Circuit
  • Readout
  • Silicon resonator
  • Tunable-Gain

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