MOSFET Drain Breakdown Voltage

Wu Shiung Feng, T. Y. Chan, Chen-Ming Hu

Research output: Contribution to journalArticle

20 Scopus citations

Abstract

A bstract—The grounded-gate or gate-assisted drain breakdown voltage of n-channel MOSFET's has been characterized for wide ranges of oxide thickness and substrate doping concentration. Two distinct regimes, one being channel-doping limited and the other being oxide-thickness limited, have been identified. We propose that these two regimes reflect two possible locations of breakdown—at the n+ -p junction and in the deep-depletion layer in the n+ drain. They can be separated by their different breakdown voltage dependences on Vg and require different approaches to process improvement.

Original languageEnglish
Pages (from-to)449-450
Number of pages2
JournalIEEE Electron Device Letters
Volume7
Issue number7
DOIs
StatePublished - 1 Jan 1986

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