Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly

Yi Chiu; Wen Ching Lai; Chun Hao Chang; Chun Po Chang; Ching Hung Chen; Chih Hsiang Lai; Wei Hung Hsu

doi:10.1109/OMN.2014.6924611

Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly

Yi Chiu^*, Wen Ching Lai, Chun Hao Chang, Chun Po Chang, Ching Hung Chen, Chih Hsiang Lai, Wei Hung Hsu

^*Corresponding author for this work

Department of Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents micro mirrors and micro assembly mechanisms fabricated by monolithic nickel electroplating. Multiple nickel structural layers were electroplated and patterned with copper as the sacrificial material. A novel side latch design was proposed and demonstrated for 3D micro assembly of micro mirrors by simple push operation of micro probes. Micro mirrors was assembled in about 15 sec in laboratory tests. The resonance frequency of the scanning mode of a stand-alone micro mirror was measured to be 4.753 kHz with a quality factor of about 470.

Original language	English
Title of host publication	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
Publisher	IEEE Computer Society
Pages	97-98
Number of pages	2
ISBN (Electronic)	9780992841423
DOIs	https://doi.org/10.1109/OMN.2014.6924611
State	Published - 14 Oct 2014
Event	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom Duration: 17 Aug 2014 → 21 Aug 2014

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Country	United Kingdom
City	Glasgow
Period	17/08/14 → 21/08/14

Access to Document

10.1109/OMN.2014.6924611

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Chiu, Y., Lai, W. C., Chang, C. H., Chang, C. P., Chen, C. H., Lai, C. H., & Hsu, W. H. (2014). Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings (pp. 97-98). [6924611] (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2014.6924611

Chiu, Yi ; Lai, Wen Ching ; Chang, Chun Hao ; Chang, Chun Po ; Chen, Ching Hung ; Lai, Chih Hsiang ; Hsu, Wei Hung. / Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly. 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society, 2014. pp. 97-98 (International Conference on Optical MEMS and Nanophotonics).

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title = "Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly",

abstract = "This paper presents micro mirrors and micro assembly mechanisms fabricated by monolithic nickel electroplating. Multiple nickel structural layers were electroplated and patterned with copper as the sacrificial material. A novel side latch design was proposed and demonstrated for 3D micro assembly of micro mirrors by simple push operation of micro probes. Micro mirrors was assembled in about 15 sec in laboratory tests. The resonance frequency of the scanning mode of a stand-alone micro mirror was measured to be 4.753 kHz with a quality factor of about 470.",

author = "Yi Chiu and Lai, {Wen Ching} and Chang, {Chun Hao} and Chang, {Chun Po} and Chen, {Ching Hung} and Lai, {Chih Hsiang} and Hsu, {Wei Hung}",

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doi = "10.1109/OMN.2014.6924611",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

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Chiu, Y, Lai, WC, Chang, CH, Chang, CP, Chen, CH, Lai, CH & Hsu, WH 2014, Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly. in 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings., 6924611, International Conference on Optical MEMS and Nanophotonics, IEEE Computer Society, pp. 97-98, 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014, Glasgow, United Kingdom, 17/08/14. https://doi.org/10.1109/OMN.2014.6924611

Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly. / Chiu, Yi; Lai, Wen Ching; Chang, Chun Hao; Chang, Chun Po; Chen, Ching Hung; Lai, Chih Hsiang; Hsu, Wei Hung.

2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society, 2014. p. 97-98 6924611 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Lai, Wen Ching

AU - Chang, Chun Hao

AU - Chang, Chun Po

AU - Chen, Ching Hung

AU - Lai, Chih Hsiang

AU - Hsu, Wei Hung

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N2 - This paper presents micro mirrors and micro assembly mechanisms fabricated by monolithic nickel electroplating. Multiple nickel structural layers were electroplated and patterned with copper as the sacrificial material. A novel side latch design was proposed and demonstrated for 3D micro assembly of micro mirrors by simple push operation of micro probes. Micro mirrors was assembled in about 15 sec in laboratory tests. The resonance frequency of the scanning mode of a stand-alone micro mirror was measured to be 4.753 kHz with a quality factor of about 470.

AB - This paper presents micro mirrors and micro assembly mechanisms fabricated by monolithic nickel electroplating. Multiple nickel structural layers were electroplated and patterned with copper as the sacrificial material. A novel side latch design was proposed and demonstrated for 3D micro assembly of micro mirrors by simple push operation of micro probes. Micro mirrors was assembled in about 15 sec in laboratory tests. The resonance frequency of the scanning mode of a stand-alone micro mirror was measured to be 4.753 kHz with a quality factor of about 470.

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BT - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings

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Chiu Y, Lai WC, Chang CH, Chang CP, Chen CH, Lai CH et al. Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society. 2014. p. 97-98. 6924611. (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2014.6924611