Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly

Yi Chiu*, Wen Ching Lai, Chun Hao Chang, Chun Po Chang, Ching Hung Chen, Chih Hsiang Lai, Wei Hung Hsu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents micro mirrors and micro assembly mechanisms fabricated by monolithic nickel electroplating. Multiple nickel structural layers were electroplated and patterned with copper as the sacrificial material. A novel side latch design was proposed and demonstrated for 3D micro assembly of micro mirrors by simple push operation of micro probes. Micro mirrors was assembled in about 15 sec in laboratory tests. The resonance frequency of the scanning mode of a stand-alone micro mirror was measured to be 4.753 kHz with a quality factor of about 470.

Original languageEnglish
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE Computer Society
Pages97-98
Number of pages2
ISBN (Electronic)9780992841423
DOIs
StatePublished - 14 Oct 2014
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: 17 Aug 201421 Aug 2014

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period17/08/1421/08/14

Fingerprint Dive into the research topics of 'Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly'. Together they form a unique fingerprint.

  • Cite this

    Chiu, Y., Lai, W. C., Chang, C. H., Chang, C. P., Chen, C. H., Lai, C. H., & Hsu, W. H. (2014). Monolithic Ni-electroplated microstructure and its application in micro mirrors and micro assembly. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings (pp. 97-98). [6924611] (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2014.6924611