Monolithic MEMS resonator based pressure sensor and readout design

Po Chun Chuang, Kuei-Ann Wen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A monolithic MEMS resonator based pressure sensor and monolithically integrated with TLA. (trans-impedance amplifier) readout circuitry has been fabricated in standard lp6m AISC process. Dependence of the quality factor and ambient pressures are well known to resonator designers and it will be feasible to integrate a quality factor readout circuitry to detect ambient pressure. By measuring the sample resonator, the air pressure changes from 100 Pa to 1600 Pa, the Q factor will change from 2566 to 452 with resonant frequency in 15.4 k Hz and the readout circuit is designed accordingly. The system power consumption is 332.82 (iiW with 1.8 V pow er supply and sensitive- is 0.0203 mV per Q.

Original languageEnglish
Title of host publicationISOCC 2016 - International SoC Design Conference
Subtitle of host publicationSmart SoC for Intelligent Things
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages17-18
Number of pages2
ISBN (Electronic)9781467393089
DOIs
StatePublished - 27 Dec 2016
Event13th International SoC Design Conference, ISOCC 2016 - Jeju, Korea, Republic of
Duration: 23 Oct 201626 Oct 2016

Publication series

NameISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things

Conference

Conference13th International SoC Design Conference, ISOCC 2016
CountryKorea, Republic of
CityJeju
Period23/10/1626/10/16

Keywords

  • ASIC/MEMS process
  • Pressure sensor
  • Resonator
  • TIA

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