MODELING THE AC IMPEDANCE OF THE POLYSILICON-SILICON INTERFACE.

David Burnett*, Chen-Ming Hu, Ashok Kapoor, Duc Nguyen, Cary Yang

*Corresponding author for this work

Research output: Contribution to conferencePaper

Abstract

The ac impedance of the polysilicon-silicon interface is investigated over a range of frequency and voltage. The structure used to study the impedance in an n** plus buried layer resistor with polysilicon-silicon contacts. It is found that the ac impedance of the polysilcon-silicon interface can be modeled as a frequency-independent parallel resistance and capacitance. For devices with significant interfaces, the resistance is voltage-dependent; for clean interfaces, the resistance is voltage-independent.

Original languageEnglish
Pages154-156
Number of pages3
StatePublished - 1 Dec 1987

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    Burnett, D., Hu, C-M., Kapoor, A., Nguyen, D., & Yang, C. (1987). MODELING THE AC IMPEDANCE OF THE POLYSILICON-SILICON INTERFACE.. 154-156.