Modeling of piezoelectric actuator for compensation and controller design

Jonq Jer Tzen, Shyr Long Jeng, Wei-Hua Chieng*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

101 Scopus citations


This work proposes a novel method for describing the hysteretic non-linearity of a piezoelectric actuator. The hysteresis behavior of piezoelectric actuators, including the minor loop trajectory and the residual displacement near zero input, are modeled by a set of hysteresis operators, including a gain and an input-dependent lag, as well as the parameter scheduling method. A hysteresis model, using the identified parameters, and containing only the dominant hysteresis operator, is presented herein. Based upon a simplified hysteresis model, tracking is controlled to reduce the non-linear effects in the characteristics of the piezoelectric actuator. A proportional-integral (PI) controller, with inverse model feed-forward, suppresses the tracking error to within ±1% full span range (FSR) of the actuator, noticeably improving the tracking performance of the piezoelectric actuator.

Original languageEnglish
Pages (from-to)70-86
Number of pages17
JournalPrecision Engineering
Issue number1
StatePublished - 1 Jan 2003


  • Hysteresis model
  • Inverse model compensation
  • Piezoelectric actuator

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