Miniaturized metal semiconductor metal photocurrent system for biomolecular sensing via chemiluminescence

Chie Chieh Lin, Fu-Hsiang Ko*, Chun Chi Chen, Yuh-Shyong Yang, Feng Chi Chang, Chung Shu Wu

*Corresponding author for this work

Research output: Contribution to journalArticle

14 Scopus citations


A miniaturized metal semiconductor metal photodetector was developed as the core detector for chemiluminescence biosensor. The biosensor utilized the semiconductor manufacturing to fabricate the 83 interdigitated patterns of 250-nm metal line and 278-nm space in 100 μm x 100 μm active region. The established real-time detector was operated at 0.4 V to ensure the maximal signal to background ratio of 3600 under illumination intensity of 1.46 mW/cm2. A chemiluminescence in the miniaturized chamber was successfully proposed to determine the model protein concentration in real-time analysis. Before the emission of light from the catalytic reaction of substrate, the model protein of streptavidin bound to horseradish peroxidase was successfully immobilized onto the sensor surface through the high-affinity conjugate with biotin. The detection limit of 4.76 nM for streptavidin analysis was obtained under the calibration curve of linear range over 5-100 nM with correlation coefficient of 0.9999.

Original languageEnglish
Pages (from-to)3189-3197
Number of pages9
Issue number18
StatePublished - 1 Sep 2009


  • Biosensor
  • Chemiluminescence
  • Metal semiconductor metal photodetector
  • Model protein analysis

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