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MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications
Xiongfei Yu, Chunxiang Zhu*, Hang Hu, Albert Chin, M. F. Li, B. J. Cho, Dim Lee Kwong, P. D. Foo, M. B. Yu
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review