Microwave coplanar filters on Si substrates

K. T. Chan; Albert Chin; J. T. Kuo; Chi-Yang Chang; D. S. Duh; W. J. Lin; Chunxiang Zhu; M. F. Li; Dim Lee Kwong

doi:10.1109/MWSYM.2003.1210531

Microwave coplanar filters on Si substrates

K. T. Chan^*, Albert Chin, J. T. Kuo, Chi-Yang Chang, D. S. Duh, W. J. Lin, Chunxiang Zhu, M. F. Li, Dim Lee Kwong

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

6 Scopus citations

Abstract

The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.

Original language	English
Pages (from-to)	1909-1912
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	3
DOIs	https://doi.org/10.1109/MWSYM.2003.1210531
State	Published - 18 Aug 2003
Event	2003 IEEE MTT-S International Microwave Symposium Digest - Philadelphia, PA, United States Duration: 8 Jun 2003 → 13 Jun 2003

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title = "Microwave coplanar filters on Si substrates",

abstract = "The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.",

author = "Chan, {K. T.} and Albert Chin and Kuo, {J. T.} and Chi-Yang Chang and Duh, {D. S.} and Lin, {W. J.} and Chunxiang Zhu and Li, {M. F.} and Kwong, {Dim Lee}",

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doi = "10.1109/MWSYM.2003.1210531",

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journal = "IEEE MTT-S International Microwave Symposium Digest",

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note = "null ; Conference date: 08-06-2003 Through 13-06-2003",

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T1 - Microwave coplanar filters on Si substrates

AU - Chan, K. T.

AU - Chin, Albert

AU - Kuo, J. T.

AU - Chang, Chi-Yang

AU - Duh, D. S.

AU - Lin, W. J.

AU - Zhu, Chunxiang

AU - Li, M. F.

AU - Kwong, Dim Lee

PY - 2003/8/18

Y1 - 2003/8/18

N2 - The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.

AB - The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.

UR - http://www.scopus.com/inward/record.url?scp=0042591617&partnerID=8YFLogxK

U2 - 10.1109/MWSYM.2003.1210531

DO - 10.1109/MWSYM.2003.1210531

M3 - Conference article

AN - SCOPUS:0042591617

VL - 3

SP - 1909

EP - 1912

JO - IEEE MTT-S International Microwave Symposium Digest

JF - IEEE MTT-S International Microwave Symposium Digest

SN - 0149-645X

Y2 - 8 June 2003 through 13 June 2003

ER -

Microwave coplanar filters on Si substrates

Abstract

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