Microwave coplanar filters on Si substrates

K. T. Chan*, Albert Chin, J. T. Kuo, Chi-Yang Chang, D. S. Duh, W. J. Lin, Chunxiang Zhu, M. F. Li, Dim Lee Kwong

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations


The excellent RF performance for band-pass and band-stop microwave coplanar filters at 22∼94 GHz on silicon substrates was achieved using an optimized proton implantation process. The implantation process was optimized for better compatibility with VLSI process. The equivalent circuit model was further used to analyze the substrate loss effects of the band pass filter.

Original languageEnglish
Pages (from-to)1909-1912
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
StatePublished - 18 Aug 2003
Event2003 IEEE MTT-S International Microwave Symposium Digest - Philadelphia, PA, United States
Duration: 8 Jun 200313 Jun 2003

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