Microwave annealing for NiSiGe Schottky junction on SiGe P-channel

Yu Hsien Lin*, Yi He Tsai, Chung Chun Hsu, Guang Li Luo, Yao Jen Lee, Chao-Hsin Chien

*Corresponding author for this work

Research output: Contribution to journalArticle

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Chemical Compounds

Engineering & Materials Science