Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition

Z. Xu*, A. Daga, H. D. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

39 Scopus citations

Abstract

Dense, high-index, and reproducible scandium oxide (Sc2O3) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc2O3 thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for Sc2O3 thin films prepared at different deposition temperatures.

Original languageEnglish
Pages (from-to)3782-3784
Number of pages3
JournalApplied Physics Letters
Volume79
Issue number23
DOIs
StatePublished - 3 Dec 2001

Fingerprint Dive into the research topics of 'Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition'. Together they form a unique fingerprint.

Cite this