Microstructure and magnetic properties of oxidized titanium nitride thin films in situ grown by pulsed laser deposition

S. C. Chen*, K. Y. Sung, W. Y. Tzeng, Kaung-Hsiung Wu, Jenh-Yih Juang, T. M. Uen, Chih-Wei Luo, Jiunn-Yuan Lin, T. Kobayashi, Hao-Chung Kuo

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

Different oxidation states of titanium nitride thin films, including pure TiN(h 0 0), TiN1-xOx(h 0 0), Ti2O3(0 0 l) and pure anatase TiO2(0 0 l), were prepared by pulsed laser deposition with various oxygen pressures using a TiN target. Elaborative evolutions of the crystal and electronic structures of the obtained films were examined systematically by x-ray diffraction and x-ray absorption spectroscopy. We found that the Ti2O3(0 0 l) film, which was prepared at oxygen pressures , exhibited the maximum room temperature ferromagnetism (RTFM) behaviour. The bound magnetic polaron model is used to clarify the origin of RTFM in these films.

Original languageEnglish
Article number075002
Number of pages7
JournalJournal of Physics D: Applied Physics
Volume46
Issue number8
DOIs
StatePublished - 20 Feb 2013

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