Micro/nano-structures formation on ITO thin film irradiated by different femtosecond laser wavelengths

Chung-Wei Cheng*, I. M. Lee, W. C. Shen, C. Y. Lin, J. S. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


This study presented the fabrication of micro/nano crystalline indium tin oxide (c-ITO) patterns on glass substrate using a femtosecond laser-induced crystallization followed by chemical etching. In the proposed approach, an amorphous ITO (a-ITO) thin film was transformed into a c-ITO micro/nano structure over a predetermined area using femtosecond laser beam irradiation, under two different wavelengths, 1064 nm and 532 nm, of 1 MHz repetition rate femtosecond fiber laser. The residual a-ITO thin film was removed by an etchant solution, in order to form a uniform c-ITO pattern. The formation was due to the heat accumulation effect provided by the high-repetition rate of the femtosecond laser pulses. When the laser power approached the ablation threshold of the a-ITO thin film, periodic-like c-ITO nanostructures with one-quarter of the irradiation laser wavelength were formed by linearly-polarized laser beam irradiation.

Original languageEnglish
Pages (from-to)213-217
Number of pages5
JournalJournal of Laser Micro Nanoengineering
Issue number3
StatePublished - 1 Dec 2010


  • Crystalline
  • Femtosecond laser
  • Heat accumulation effect
  • ITO
  • Patterning

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