Micrometer patterning of phthaiocyanine derivatives by selective chemical vapor deposition method

A. Sekiauchi, K. Pasztor, N. Shimo, Hiroshi Masuhara*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Selective chemical vapor deposition was achieved to produce copper phthaiocyanine thin films on the copper microelectrodes on insulating and optically transparent materials. By thermally annealing the fabricated films at 500 °C under vacuum, their quality was greatly improved and the conductivity of the modified copper microelectrodes became high.

Original languageEnglish
Pages (from-to)1508-1510
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume10
Issue number4
DOIs
StatePublished - 1 Jan 1992

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