Selective chemical vapor deposition was achieved to produce copper phthaiocyanine thin films on the copper microelectrodes on insulating and optically transparent materials. By thermally annealing the fabricated films at 500 °C under vacuum, their quality was greatly improved and the conductivity of the modified copper microelectrodes became high.
|Number of pages||3|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|State||Published - 1 Jan 1992|