Microfabrication of photosensitive glass by femtosecond laser direct writing

Chung-Wei Cheng; J. S. Chen; P. X. Lee; C. W. Chien

doi:10.4028/www.scientific.net/AMR.126-128.394

Microfabrication of photosensitive glass by femtosecond laser direct writing

Chung-Wei Cheng, J. S. Chen, P. X. Lee, C. W. Chien

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this study, a method for the fabrication of microstructures on the surface and inside photosensitive glass (Foturan glass) by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). Two examples: (a) a U-shaped microchannel and (b) an arc-type microchannel formed inside glass are presented

Original language	English
Title of host publication	Advances in Abrasive Technology XIII
Pages	394-400
Number of pages	7
DOIs	https://doi.org/10.4028/www.scientific.net/AMR.126-128.394
State	Published - 1 Dec 2010
Event	13th International Symposium on Advances in Abrasive Technology, ISAAT2010 - Taipei, Taiwan Duration: 19 Sep 2010 → 22 Sep 2010

Publication series

Name	Advanced Materials Research
Volume	126-128
ISSN (Print)	1022-6680

Conference

Conference	13th International Symposium on Advances in Abrasive Technology, ISAAT2010
Country	Taiwan
City	Taipei
Period	19/09/10 → 22/09/10

Keywords

Femtosecond laser
Microstructure
Photosensitive glass

Access to Document

10.4028/www.scientific.net/AMR.126-128.394

Link to publication in Scopus

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Cheng, C-W., Chen, J. S., Lee, P. X., & Chien, C. W. (2010). Microfabrication of photosensitive glass by femtosecond laser direct writing. In Advances in Abrasive Technology XIII (pp. 394-400). (Advanced Materials Research; Vol. 126-128). https://doi.org/10.4028/www.scientific.net/AMR.126-128.394

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keywords = "Femtosecond laser, Microstructure, Photosensitive glass",

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Cheng, C-W, Chen, JS, Lee, PX & Chien, CW 2010, Microfabrication of photosensitive glass by femtosecond laser direct writing. in Advances in Abrasive Technology XIII. Advanced Materials Research, vol. 126-128, pp. 394-400, 13th International Symposium on Advances in Abrasive Technology, ISAAT2010, Taipei, Taiwan, 19/09/10. https://doi.org/10.4028/www.scientific.net/AMR.126-128.394

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N2 - In this study, a method for the fabrication of microstructures on the surface and inside photosensitive glass (Foturan glass) by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). Two examples: (a) a U-shaped microchannel and (b) an arc-type microchannel formed inside glass are presented

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