Microfabrication of photosensitive glass by femtosecond laser direct writing

Chung-Wei Cheng, J. S. Chen, P. X. Lee, C. W. Chien

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, a method for the fabrication of microstructures on the surface and inside photosensitive glass (Foturan glass) by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). Two examples: (a) a U-shaped microchannel and (b) an arc-type microchannel formed inside glass are presented

Original languageEnglish
Title of host publicationAdvances in Abrasive Technology XIII
Pages394-400
Number of pages7
DOIs
StatePublished - 1 Dec 2010
Event13th International Symposium on Advances in Abrasive Technology, ISAAT2010 - Taipei, Taiwan
Duration: 19 Sep 201022 Sep 2010

Publication series

NameAdvanced Materials Research
Volume126-128
ISSN (Print)1022-6680

Conference

Conference13th International Symposium on Advances in Abrasive Technology, ISAAT2010
CountryTaiwan
CityTaipei
Period19/09/1022/09/10

Keywords

  • Femtosecond laser
  • Microstructure
  • Photosensitive glass

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  • Cite this

    Cheng, C-W., Chen, J. S., Lee, P. X., & Chien, C. W. (2010). Microfabrication of photosensitive glass by femtosecond laser direct writing. In Advances in Abrasive Technology XIII (pp. 394-400). (Advanced Materials Research; Vol. 126-128). https://doi.org/10.4028/www.scientific.net/AMR.126-128.394