Micro knife-edge optical measurement devices fabricated by SOI and CMOS MEMS processes

Tzu Lin Chang*, Victor Farm Guoo Tseng, Yi Chiu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Fingerprint Dive into the research topics of 'Micro knife-edge optical measurement devices fabricated by SOI and CMOS MEMS processes'. Together they form a unique fingerprint.

Engineering & Materials Science