Micro actuated grating for multi-beam optical pickups

Chi Hung Lee, Yi Chiu, Han Ping D Shieh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


An actuated micro-grating integrated on a micro-optical bench is achieved using micro-machining process. The device switches between the single beam and multiple beams, and can be applied for writing and reading data in the disc, respectively.

Original languageEnglish
Title of host publicationOptical Data Storage, ODS 2007
PublisherOptical Society of America (OSA)
ISBN (Print)1557528403, 9781557528407
StatePublished - 1 Jan 2007
EventOptical Data Storage, ODS 2007 - Portland, OR, United States
Duration: 20 May 200720 May 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceOptical Data Storage, ODS 2007
CountryUnited States
CityPortland, OR


  • Grating
  • Multi-beam optical pickup
  • Stress-induced actuator

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