Micro actuated grating for multi-beam optical pickups

Chi Hung Lee*, Yi Chiu, Han Ping D Shieh

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


A stress-induced curved \micro actuator with a grating attached at the end is demonstrated for recordable optical storage applications. The actuator and the grating were fabricated using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity from the grating were generated when a voltage is applied to the actuator to switch its position. The single-beam and multi-beam configurations can be used for writing and reading data in the disc, respectively.

Original languageEnglish
Title of host publicationOptical Data Storage 2007
StatePublished - 23 Nov 2007
EventOptical Data Storage 2007 - Portland, OR, United States
Duration: 20 May 200723 May 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceOptical Data Storage 2007
CountryUnited States
CityPortland, OR


  • Actuator
  • Binary grating
  • Micro-machining
  • Optical pickup

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