Method for Manufacturing A Combined Solid Immersion Lens(SIL) And Submicron Aperture, And Device Thereof

Wen-Syang Hsu (Inventor), Chung-Hao Tien (Inventor)

Research output: Patent

Abstract

The invention relates to an integrated method for manufacturing a combined solid immersion lens (SIL) and submicron aperture, and device thereof, comprising depositing a sacrificial layer on a substrate, coating a photoresist on the sacrificial layer and using photo-lithography to form an aperture on the photoresist, applying reflow and etching process to remove the sacrificial layer below the aperture, depositing a conductive material on the photoresist and performing electroplating to reduce the aperture size, then coating another photoresist and using photo-lithography to form a cylindrical phtoresist above the aperture, applying a high temperature thermal reflow to form a microlens, and finally removing the substrate to obtain an optical read/write apparatus with a combined solid immersion lens (SIL) and submicron aperture.
Original languageEnglish
Patent number6809886
StatePublished - 26 Oct 2004

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