| Original language | English |
|---|---|
| Patent number | 6809886 |
| State | Published - 26 Oct 2004 |
Method for Manufacturing A Combined Solid Immersion Lens(SIL) And Submicron Aperture, And Device Thereof
Wen-Syang Hsu (Inventor), Chung-Hao Tien (Inventor)
Research output: Patent