Method for Manufacturing A Combined Solid Immersion Lens(SIL) And Submicron Aperture, And Device Thereof

Wen-Syang Hsu (Inventor), Chung-Hao Tien (Inventor)

Research output: Patent

Original language	English
Patent number	6809886
State	Published - 26 Oct 2004

Cite this

Hsu, W-S., & Tien, C-H. (2004). Method for Manufacturing A Combined Solid Immersion Lens(SIL) And Submicron Aperture, And Device Thereof. (Patent No. 6809886).