| Original language | English |
|---|---|
| Patent number | US 8,435,875 B1 |
| State | Published - 7 May 2013 |
Method for forming T-shaped gate structure
Edward Yi Chang (Inventor), Wei-Hua Chieng (Inventor)
Research output: Patent
Edward Yi Chang (Inventor), Wei-Hua Chieng (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | US 8,435,875 B1 |
| State | Published - 7 May 2013 |