Original language | English |
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Patent number | US 8,435,875 B1 |
State | Published - 7 May 2013 |
Method for forming T-shaped gate structure
Edward Yi Chang (Inventor), Wei-Hua Chieng (Inventor)
Research output: Patent
Edward Yi Chang (Inventor), Wei-Hua Chieng (Inventor)
Research output: Patent
Original language | English |
---|---|
Patent number | US 8,435,875 B1 |
State | Published - 7 May 2013 |