Mesoporous carbon powder gas sensors for detection of carbon monoxide

Chih Cheng Lu*, Kuan Hsun Liao, Jeff Tsung Hui Tsai, Chueh Yang Liu, Jih-Perng Leu

*Corresponding author for this work

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

This article reports a new class of silicon-based microgas sensors utilizing hexagonally-ordered mesoporous carbon powders (MCPs) as the sensitive film. The mesoporous carbon powders featuring high-specific surface area are replicated by the SBA-15 silica template and immobilized between Cr electrodes on a 9 × 9 cm silicon chip by using a.c. dielectrophoresis (DEP) process at room temperature. The silicon sensor platform comprises Cr microheaters embedded in a dielectric thin membrane manufactured by microelectromechanical systems back-etching techniques. It is shown that MCPs can be satisfactorily aligned along electric fields and accumulated to the electrode area. Investigations into CO detection are carried out to verify gas-sensitive characteristics of the MCP nanofilm. Our experimental results disclose the mesoporous carbon powders are successfully chemoresistive to CO, and demonstrate distinct resistance change with respect to ppm-level variation. In addition, response time, recovery time, and reproducible sensing behavior are experimentally obtained.

Original languageEnglish
Pages (from-to)399-404
Number of pages6
JournalBiomedical Engineering - Applications, Basis and Communications
Volume21
Issue number6
DOIs
StatePublished - 1 Dec 2009

Keywords

  • Dielectrophoresis
  • Gas sensor
  • MEMS
  • Mesoporous carbon powder
  • Microhotplate

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