MEMS technology development and manufacturing in a CMOS foundry

C. M. Liu*, Bruce C.S. Chou, Robert Chin Fu Tsai, Nick Y.M. Shen, Benior S.F. Chen, Emerson C.W. Cheng, Hsiao Chin Tuan, Alex Kalnitsky, Sean Cheng, Chung Hsien Lin, Tien-Kan Chung, Kuei Sung Chang, Yi Shao Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

16 Scopus citations

Abstract

MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process phase-in and internally developed platform are discussed. The latter is a TSMC-MEMS platform for motion sensors and other devices.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages807-810
Number of pages4
DOIs
StatePublished - 1 Sep 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period5/06/119/06/11

Keywords

  • CMOS-MEMS
  • MEMS Foundry Service

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