MEMS SoC: Observer-based coplanar gyro-free inertial measurement unit

Tsung-Lin Chen*, Sungsu Park

*Corresponding author for this work

Research output: Contribution to journalArticle

20 Scopus citations


This paper presents a novel design of a coplanar gyro-free inertial measurement unit (IMU) that consists of seven to nine single-axis linear accelerometers, and it can be utilized to perform the six DOF measurements for an object in motion. Unlike other gyro-fee IMUs, this design uses redundant accelerometers and state estimation techniques to facilitate the in situ and mass fabrication for the employed accelerometers. The alignment error from positioning accelerometers onto a measurement unit and the fabrication cost of an IMU can greatly be reduced. The outputs of the proposed design are three linear accelerations and three angular velocities. As compared to other gyro-free IMUs, the proposed design uses less integral operation and thus improves its sensing resolution and drifting problem. The sensing resolution of a gyro-free IMU depends on the sensing resolution of the employed accelerometers as well as the size of the measurement unit. Simulation results indicate that the sensing resolution of the proposed design is 2°s-1 for the angular velocity and 10 μg for the linear acceleration when nine single-axis accelerometers, each with 10 μg sensing resolution, are deployed on a 4 inch diameter disc. Also, thanks to the iterative EKF algorithm, the angle estimation error is within 10-3 deg at 2 s.

Original languageEnglish
Pages (from-to)1664-1673
Number of pages10
JournalJournal of Micromechanics and Microengineering
Issue number9
StatePublished - 1 Sep 2005

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