MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter

Yi Chiu*, Chiung Ting Kuo, Yu Shan Chu

*Corresponding author for this work

Research output: Contribution to journalArticle

23 Scopus citations

Abstract

This paper presents a micro electrostatic vibration-to-electricity energy converter based on the micro-electromechanical system. For the 3.3V supply voltage and 1cm2 chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200μW/cm2 for the optimal load of 8MΩ. The device was fabricated in a silicon-on-insulator wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Fabrication processes are being refined to remove the back silicon substrate to eliminate residual particles and parasitic capacitance.

Original languageEnglish
Pages (from-to)1663-1669
Number of pages7
JournalMicrosystem Technologies
Volume13
Issue number11-12
DOIs
StatePublished - 1 Jul 2007

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