MEMS based micromirror device for optical add/drop module

Jin-Chern Chiou*, Y. C. Lin, S. D. Wu, Shiuan-Huei Lin

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

Original languageEnglish
Pages (from-to)82-88
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4593
DOIs
StatePublished - 1 Dec 2001
EventDesign, Chararacterization, and Packaging for MEMS and Microelectronics II - Adelaide, Australia
Duration: 17 Dec 200119 Dec 2001

Keywords

  • Holographic gratings
  • OADM
  • Optical MEMS

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