MEGAVOLT BIORON AND ARSENIC IMPLANTATION INTO SILICON.

P. F. Byrne*, N. W. Cheung, S. Tam, Chen-Ming Hu, Y. C. Shih, J. Washburn, M. Strathman

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

14 Scopus citations
Original languageEnglish
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherNorth-Holland
Pages253-258
Number of pages6
ISBN (Print)0444008691
DOIs
StatePublished - 1 Jan 1984

Publication series

NameMaterials Research Society Symposia Proceedings
Volume27
ISSN (Print)0272-9172

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