Measuring the deflection of the cantilever in atomic force microscope with an optical pickup system

Meng Hu Lin*, Shao-Kang Hung, Sheng-Chieh Huang, Li Chen Fu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper is to present the development and the verification of a compact optical sensor system for measuring the deflection of the cantilever in a tapping-mode atomic force microscope (AFM). An optical pickup head of commercial digital versatile disc read only memory (DVD-ROM) drive is applied in this sensor system. In order to satisfy the strict measuring requirements of sensibility and reliability, the build-in detection system is replaced with a four-quadrant photodiode of traditional optical-lever technique. In addition, an inertial motor composed by a piezo-actuator is used as the sample approaching mechanism and the scanner in the vertical direction. Thus, the volume of hardware structure is decreased, and the sensing variance due to temperature change will be minimized. The developed AFM system is well functionally verified by measuring a calibration grating with step height 19.5 nm, and the vertical resolution is ±8 nm.

Original languageEnglish
Title of host publicationProceedings of the 45th IEEE Conference on Decision and Control 2006, CDC
Pages592-596
Number of pages5
DOIs
StatePublished - 1 Dec 2006
Event45th IEEE Conference on Decision and Control 2006, CDC - San Diego, CA, United States
Duration: 13 Dec 200615 Dec 2006

Publication series

NameProceedings of the IEEE Conference on Decision and Control
ISSN (Print)0191-2216

Conference

Conference45th IEEE Conference on Decision and Control 2006, CDC
CountryUnited States
CitySan Diego, CA
Period13/12/0615/12/06

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