Materials issues and characterization of low-k dielectric materials

E. Todd Ryan, Andrew J. McKerrow, Jih-Perng Leu, Paul S. Ho

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@article{0b3c41246c2047caad12c8c7eaae000e,

title = "Materials issues and characterization of low-k dielectric materials",

author = "Ryan, {E. Todd} and McKerrow, {Andrew J.} and Jih-Perng Leu and Ho, {Paul S.}",

year = "1997",

month = oct,

day = "1",

doi = "10.1557/S0883769400034205",

language = "English",

volume = "22",

pages = "49--54",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Cambridge University Press",

number = "10",

}

TY - JOUR

T1 - Materials issues and characterization of low-k dielectric materials

AU - Ryan, E. Todd

AU - McKerrow, Andrew J.

AU - Leu, Jih-Perng

AU - Ho, Paul S.

PY - 1997/10/1

Y1 - 1997/10/1

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U2 - 10.1557/S0883769400034205

DO - 10.1557/S0883769400034205

M3 - Article

AN - SCOPUS:0001538906

VL - 22

SP - 49

EP - 54

JO - MRS Bulletin

JF - MRS Bulletin

SN - 0883-7694

IS - 10

ER -