Materials issues and characterization of low-k dielectric materials

E. Todd Ryan, Andrew J. McKerrow, Jih-Perng Leu, Paul S. Ho

Research output: Contribution to journalArticlepeer-review

55 Scopus citations
Original languageEnglish
Pages (from-to)49-54
Number of pages6
JournalMRS Bulletin
Volume22
Issue number10
DOIs
StatePublished - 1 Oct 1997

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