Making optical MEMS sensors more compact using organic light sources and detectors

Thilo Sauter, Wilfried Hortschitz, Harald Steiner, Michael Stifter, Hsin Chiao, Hsiao-Wen Zan, Hsin-Fei Meng, Chang-Po Chao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Vibration and displacement sensors need to be compact for many applications in automation or consumer electronics, and microelectromechanical structures are a convenient way to implement such sensors. For these MEMS devices, optical readout methods have proven to be superior to capacitive or piezoresistive strategies in terms of sensitivity as well as noise and interference immunity, however the integration of light sources and detectors is not easily possible. This paper presents an approach to use organic optoelectronic devices for the readout. OLED and OPD (organic photo detector) are structured on the glass substrate and cover encapsulating the MEMS devices, allowing for a tightly integrated sensor based on vertical light flux modulation by a horizontally moving proof mass. The paper describes the principle sensor structure as well as the fabrication of suitable organic devices. First test results show that the approach is feasible.

Original languageEnglish
Title of host publication19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014
EditorsHerminio Martinez Garcia, Antoni Grau
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479948468
DOIs
StatePublished - 8 Jan 2014
Event19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014 - Barcelona, Spain
Duration: 16 Sep 201419 Sep 2014

Publication series

Name19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014

Conference

Conference19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014
CountrySpain
CityBarcelona
Period16/09/1419/09/14

Keywords

  • displacement sensor
  • MEMS
  • OLED
  • OPD
  • smart sensor
  • vibration sensor

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  • Cite this

    Sauter, T., Hortschitz, W., Steiner, H., Stifter, M., Chiao, H., Zan, H-W., Meng, H-F., & Chao, C-P. (2014). Making optical MEMS sensors more compact using organic light sources and detectors. In H. Martinez Garcia, & A. Grau (Eds.), 19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014 [7005342] (19th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ETFA.2014.7005342