Luminescent and structural characteristics of ZnO nanorods fabricated by postannealing

Chin Ching Lin, Hung Chou Liao, San-Yuan Chen*, Syh Yuh Cheng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Well-aligned ZnO nanorods grown on silicon substrates buffered with ZnO film were postannealed at 200-1000 °C in various atmospheres. The optical properties of ZnO nanorods were much improved by annealing at high temperatures in both atmospheres of N2 and O2. This improvement was ascribed to the decrease in structure defects as compared to as-grown ZnO nanorods. However, for the ZnO nanorods annealed in H2 N2, a stronger UV emission occurs at 600 °C; above that the UV emission rapidly disappeared, which was attributed to the collapse of the ZnO nanorods due to H2 etching during a higher-temperature annealing in H2 N2. The crystallinity and optical properties of the ZnO nanorods can be controlled by postannealing treatment.

Original languageEnglish
Pages (from-to)304-307
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number1
StatePublished - 1 Jan 2006

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